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发表时间：2022-10-06

发表刊物：材料研究学报

期号：6

页面范围：582-586

ISSN号：1005-3093

摘要：Diamond-like carbon (DLC) films were prepared on Si(100) substrates by combining plasma source ion implantation and electron cyclotron resonance microwave plasma enhanced chemical vapor deposition technique. Confocal Raman spectra confirmed the DLC characteristics of the films. The surface roughness of the films was measured with an atomic force microscope. The CERT microtribometer system was employed to obtain information about the scratch resistance, friction properties, and sliding wear resistance of the films. The condition of wear was checked by a scanning electron microscope. The results show that the adherent strength between DLC films and substrates was improved by plasma source ion implantation, and the films had low friction coefficient (0.1-0.15) and good wear-resistant performance.

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