骆英民

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工程师

性别:男

毕业院校:大连理工大学

学位:博士

所在单位:集成电路学院

学科:微电子学与固体电子学

办公地点:开发区校区教学楼C区505

联系方式:0411-62273207

电子邮箱:ymluo@dlut.edu.cn

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ZnO Films on Transferable and Low Thermal Resistance Graphite Substrate Grown by Ultrasonic Spray Pyrolysis

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论文类型:期刊论文

发表时间:2014-06-01

发表刊物:JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION

收录刊物:SCIE、EI、ISTIC

卷号:29

期号:3

页面范围:428-432

ISSN号:1000-2413

关键字:ZnO; graphite; photoluminescence; transferable devices

摘要:ZnO thin films were deposited on graphite substrates by ultrasonic spray pyrolysis method with Zn(CH3COO)(2)center dot 2H(2)O aqueous solution as precursor. The crystalline structure, morphology, and optical properties of the as-grown ZnO films were investigated systematically as a function of deposition temperature and growth time. Near-band edge ultraviolet (UV) emission was observed in room temperature photoluminescence spectra for the optimized samples, yet the usually observed defect related deep level emissions were nearly undetectable, indicating that high optical quality ZnO thin films could be achieved via this ultrasonic spray pyrolysis method. Considering the features of transferable and low thermal resistance of the graphite substrates, the achievement will be of special interest for the development of high-power semiconductor devices with sufficient power durability.