Indexed by:期刊论文
Date of Publication:2014-01-01
Journal:J. Appl. Phys.
Volume:115
Issue:1
Page Number:13301-13301
Pre One:Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O-2/CF4 discharges
Next One:Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender:Male
Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:物理学院
Discipline:Plasma physics
Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室
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