大连理工大学主页平台管理系统 YongXin Liu--yxliu-- An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge

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An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge

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Date of Publication:2024-09-05

Journal:PLASMA PROCESSES AND POLYMERS

Volume:21

Issue:8

ISSN No.:1612-8850

Key Words:AR; DRIVEN; ENERGY-DISTRIBUTION FUNCTION; OPTIMIZATION; OXIDATION; PLASMA-DENSITY

Pre One:Hysteresis in radio frequency capacitively coupled CF4 plasmas

Next One:Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source

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Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室

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