大连理工大学主页平台管理系统 YongXin Liu--yxliu-- Hysteresis in radio frequency capacitively coupled CF4 plasmas

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Hysteresis in radio frequency capacitively coupled CF4 plasmas

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Date of Publication:2024-08-28

Volume:33

Issue:8

ISSN No.:0963-0252

Key Words:DISCHARGES; FLUORINE-ATOMS; IMPACT; KINETICS; TRANSITION

Pre One:Electron power absorption in CF4 capacitively coupled RF plasmas operated in the striation mode

Next One:An experimental and computational investigation of discharge mode transitions in a partially magnetized radio frequency capacitively coupled oxygen discharge

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Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室

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