Date of Publication:2024-05-17
Journal:Plasma Sources Science and Technology
Volume:33
Issue:4
ISSN No.:0963-0252
Key Words:Absorption mechanisms; Boltzmann; Boltzmann term analyse; Capacitively coupled plasmas; Electric discharges; Electron power; Electron power absorption; Inductively coupled plasma; Particle-in-cell simulations; Plasma simulation; Power absorption; Term analysis; Voltage amplitude
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender:Male
Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:物理学院
Discipline:Plasma physics
Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室
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