大连理工大学主页平台管理系统 YongXin Liu A comprehensive study on the electron cyclotron resonance effect in a weakly magnetized capacitively coupled RF plasma: experiment, simulation and modeling yxliu

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A comprehensive study on the electron cyclotron resonance effect in a weakly magnetized capacitively coupled RF plasma: experiment, simulation and modeling

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Indexed by:Journal Papers

Document Code:363697

Date of Publication:2023-04-01

Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY

Volume:32

Issue:4

ISSN:0963-0252

Key Words:FIELD; OPTIMIZATION; POWER DISSIPATION; TRANSITION

Pre One : Experimental investigation of the radially-dependent ignition process in a pulsed capacitively coupled RF discharge: Effects of pressure, voltage and afterglow duration

Next One : The electrical asymmetry effect in electronegative CF4 capacitive RF plasmas operated in the striation mode

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Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室

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