Indexed by:Journal Papers
Document Code:373173
Date of Publication:2023-08-01
Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume:32
Issue:8
ISSN:0963-0252
Key Words:ARGON; BEAMS; CONSISTENT PARTICLE SIMULATION; DISCHARGE; ENERGY-DISTRIBUTION
Pre One : A comprehensive study on the electron cyclotron resonance effect in a weakly magnetized capacitively coupled RF plasma: experiment, simulation and modeling
Next One : Effect of a negative DC bias on a capacitively coupled Ar plasma operated at different radiofrequency voltages and gas pressures
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender:Male
Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:物理学院
Discipline:Plasma physics
Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室
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