Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume:32
Issue:8
ISSN No.:0963-0252
Key Words:ARGON; BEAMS; CONSISTENT PARTICLE SIMULATION; DISCHARGE; ENERGY-DISTRIBUTION
Pre One:A comprehensive study on the electron cyclotron resonance effect in a weakly magnetized capacitively coupled RF plasma: experiment, simulation and modeling
Next One:Effect of a negative DC bias on a capacitively coupled Ar plasma operated at different radiofrequency voltages and gas pressures
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender:Male
Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:物理学院
Discipline:Plasma physics
Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室
Open time:..
The Last Update Time:..
