大连理工大学主页平台管理系统 YongXin Liu--yxliu-- An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes

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An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes

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Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY

Volume:33

Issue:2

ISSN No.:0963-0252

Pre One:Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources

Next One:Experimental investigation of the radially-dependent ignition process in a pulsed capacitively coupled RF discharge: Effects of pressure, voltage and afterglow duration

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Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室

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