Journal:APPLIED PHYSICS LETTERS
Volume:124
Issue:6
ISSN No.:0003-6951
Key Words:AR; GLOW-DISCHARGES; ION ENERGY-DISTRIBUTIONS; PARAMETERS; PRESSURE
Pre One:Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap
Next One:An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender:Male
Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:物理学院
Discipline:Plasma physics
Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室
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