大连理工大学主页平台管理系统 YongXin Liu An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes yxliu

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Discharge similarity in capacitive radio frequency carbon tetrafluoride plasmas

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Indexed by:Journal Papers

Document Code:584365

Date of Publication:2025-09-22

Journal:APPLIED PHYSICS LETTERS

Volume:127

Issue:12

ISSN:0003-6951

Key Words:LAWS; SIMULATION; TRANSITION

Pre One : Dynamics of electron power absorption in capacitive radio-frequency CF4 plasmas operating in the striation mode

Next One : Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms

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Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室

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