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性别: 男

毕业院校: 大连理工大学

学位: 博士

所在单位: 物理学院

学科: 等离子体物理

办公地点: 大连理工大学三束材料改性教育部重点实验室3号楼201室

电子邮箱: yxliu129@dlut.edu.cn

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当前位置: Yong >> 科学研究 >> 论文成果
Absolute CF2 density and gas temperature measurements by absorption spectroscopy in dual-frequency capacitively coupled CF4/Ar plasmas

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论文类型: 期刊论文

发表时间: 2014-10-01

发表刊物: PHYSICS OF PLASMAS

收录刊物: SCIE、EI、Scopus

卷号: 21

期号: 10

ISSN号: 1070-664X

摘要: Broadband ultraviolet absorption spectroscopy has been used to determine the CF2 radical density in dual-frequency capacitively coupled CF4/Ar plasmas, using the CF2 (A) over tilde B-1(1) <- (X) over tilde (1)A(1) system of absorption spectrum. The rotational temperature of ground state CF2 and excited state CF was also estimated by using (A) over tilde B-1(1) <- (X) over tilde (1)A(1) system and B-2 Delta - X-2 Pi system, respectively. The translational gas temperature was deduced from the Doppler width of the Ar*(P-3(2)) and Ar*(P-3(0)) metastable atoms absorption line by using the tunable diode laser absorption spectroscopy. The rotational temperatures of the excited state CF are about 100K higher than those of ground state CF2, and about 200K higher than the translational gas temperatures. The dependences of the radical CF2 density, electron density, electron temperature, rotational temperature, and gas temperature on the high frequency power and pressure have been analyzed. Furthermore, the production and loss mechanisms of CF2 radical and the gas heating mechanisms have also been discussed. (C) 2014 AIP Publishing LLC.

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