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论文类型： 期刊论文

发表时间： 2011-07-27

发表刊物： PHYSICAL REVIEW LETTERS

收录刊物： Scopus、SCIE、EI、PubMed

卷号： 107

期号： 5

页面范围： 055002

ISSN号： 0031-9007

摘要： We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.