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论文类型：期刊论文

发表时间：2013-11-01

发表刊物：SURFACE ENGINEERING

收录刊物：SCIE、EI、Scopus

卷号：29

期号：10

页面范围：749-754

ISSN号：0267-0844

关键字：Ti-Si-N; Nanocomposite; Hardness; Adhesion

摘要：The objective of this work is to settle the problem of adhesion between hard films and soft metal substrates. Hard Ti-Si-N films were deposited onto soft Al substrates with a double target magnetron sputtering system. The composition, structure, surface morphologies and mechanical properties were characterised by electron probe microanalyser, X-ray diffraction, atomic force microscope, scratch test and nanoindentation respectively. The as-deposited films had good adhesion to the Al substrates and had a smooth and lustrous surface. The maximum hardness of the films achieved was as high as 27.2 GPa at the Si target power of 80 W.