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张权治

Associate Professor   Supervisor of Doctorate Candidates   Supervisor of Master's Candidates

Gender:Male

Date of Birth:1987-01-01

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学 物理学院303

E-Mail:qzzhang@dlut.edu.cn


Paper Publications

Realistic treatment for secondary electron emission in hybrid DC/DF capacitively coupled discharge

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Indexed by:Journal Papers

Date of Publication:2020-02-01

Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY

Included Journals:SCIE

Volume:29

Issue:2

ISSN No.:0963-0252

Key Words:DC; RF CCP; PIC; MCC; secondary electron emission

Abstract:Particle-in-cell/Monte Carlo collision simulations are performed to investigate the effects of using realistic models for secondary electron emission induced by different plasma species on the discharge characteristics in direct current (DC) superposed radio-frequency (RF) capacitively coupled plasmas (CCPs). A dual-frequency (DF, 60/2 MHz) source is applied on one of the electrodes to sustain the discharge, and an auxiliary DC source is fixed on the opposite electrode to generate energetic secondary electrons (SEs). Realistic models are employed to calculate the secondary electron yields (SEYs) induced by electrons and heavy particles (i.e. ions and fast neutrals) impacting the 'dirty' surfaces (e.g. oxidized metal), respectively, in argon discharge at a fixed pressure of 1.5 Pa. The results are compared to those obtained by assuming a constant ion-induced SEYs of gamma = 0.1, and a constant elastic reflected electron yield of eta(el.) = 0.2. As the effective SEY gamma* (arising from heavy particle impact) calculated from the realistic model is enhanced at the DC electrode, numerous gamma-electrons can be induced under the effect of the DC-bias. These gamma-electrons then bombard the opposite RF electrode with mean energies corresponding to the value of DC-bias, which further induce significant emission of delta-electrons (i.e. electron-induced SEs). Moreover, the delta-electrons originating from the RF electrode can be trapped and bounced back by the opposite DC sheath toward the RF electrode, inducing delta-electron emission once more. Consequently, this positive-feedback source of delta-electrons, leads to an enhanced ionization in the first half-cycle of the low frequency period, and a further growth in plasma density in hybrid DC/RF discharge.

Pre One:Spatio-temporal measurements of overshoot phenomenon in pulsed inductively coupled discharge

Next One:Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Profile

大连理工大学-副教授（2019年7月入职），大连理工大学“星海青千”（人才计划）。2014年6月，分别在大连理工大学和比利时-安特卫普大学(University of Antwerp)获得双博士学位。2014年8月-2016年5月，曾工作在华为技术有限公司-2012实验室。2016年6月-2019年6月，在比利时-安特卫普大学从事博士后研究工作三年 （前两年是玛丽居里学者）。


主要是针对低温等离子体技术中的关键物理问题及关键技术开展科学研究，如等离子体源电非对称效应问题的研究和等离子体刻蚀多孔材料问题的研究。

在低温等离子体物理中的物理建模、PIC/MC的模型（1、2维隐格式）、大规模并行计算、以及相关的数值仿真模拟有着独到的见解和创新，目前在Physical Review Letters, Plasma Sources Science and Technology, Applied Physics Letters等期刊上发表SCI论文27篇，论文总引用超过150次，其中2篇文章的他引超过30次。


结合模拟和实验工作，首次验证了双频 容性耦合等离子体 中的无碰撞“反弹共振加热机制”，并通过数值模拟揭示了这种加热机制的物理图像。该研究成果发表在国际顶级期刊 Phys. Rev. Lett. (JCR 1 区)上（全权负责理论模拟，皆为论文的第二作者；第一作者为实验负责人）。

针对多孔材料的等离子体低温刻蚀的系统研究，引起了国内外的广泛关注，知名的半导体技术网站“SEMICONDUCTOR ENGINEERING”对该课题进行了专题报道https://semiengineering.com/cryogenic-etch-re-emerges/。


2016年获得欧盟地平线2020玛丽居里奖-‘玛丽居里学者’（Horizon 2020 - MARIE CURIE ACTIONS: Individual Fellowship），该奖项是欧洲竞争最为激烈的青年基金（2016年的总申请人数6667人，资助率仅为14.2%）。

2019年，被德国波鸿-鲁尔大学(Ruhr-Universität Bochum；RUB) 聘为‘墨卡托学者’（Mercator Fellow）-外聘专家。


长期与国内外开展相关研究的课题组保持着紧密联系，如比利时University of Antwerp 大学的Annemie Bogaerts(欧洲科学院院士)团队、德国Ruhr-Universität Bochum大学的Uwe Czarnetzki (Plasma Sources Science and Technology主编)团队，以及欧洲微电子研究中心（IMEC）；合作形式主要表现在合作研究科学难点、共同发表学术论文、协助指导研究生等。


招生专业：物理、数学、计算机、电气、力学、化工....


教育经历：

2005.09-2009.07 大连理工大学 物理与光电工程学院 应用物理 学士

2009.09-2014.07 大连理工大学 物理与光电工程学院 等离子体物理 博士

2013.10-2014.04 比利时-安特卫普大学 化学学院 等离子体化学 博士(联合培养-双博士学位)

 

工作经历：

2014.08-2016.05华为技术有限公司(2012实验室) 研究工程师

2016.06-2019.06比利时-安特卫普大学 博士后（玛丽居里学者）

 



发表论文：

  1.    Yu-Qing Guo, Jing-Yu Sun, Quan-Zhi Zhang*(通讯) et al, “Modulation of uniform magnetic field on electron dynamics in low‐pressure capacitively coupled plasmas”， Plasma Process Polym. 2021;e2100072

  2. Quan-Zhi Zhang et al, “Cryogenic etching of porous material”, Acta Physica Sinica, 70, 098104 (2021)

  3. Quan-Zhi Zhang* et al, “Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simula” Plasma Sources Sci. Technol. Accepted

  4. Yongxin Liu, ... Quan-Zhi Zhang* Plasma Sources Sci. Technol. 29 (2020) 12LT03 (6pp) letter 

  5. Xiao-Kun Wang,... Quan-Zhi Zhang*( co-corresponding author)，“The effect of a negative direct-current voltage on striated structures and electrical parameters in a capacitively coupled rf discharge in CF4” Plasma Sources Sci. Technol. Accepted

  6.  Jing-Yu Sun, Quan-Zhi Zhang*, and You-Nian Wang Phys. Plasmas 28, 013509 (2021);

  7.  Quan-Zhi Zhang* et al, Plasma Process Polym. 2021;e2000234 （封面文章）

  8. Quan-Zhi Zhang*, WeiZong Wang, Christophe Thille and Annemie Bogaerts         “H2S Decomposition into H2 and S2 by Plasma Technology: Comparison of Gliding Arc and Microwave Plasma” , Plasma Chemistry and Plasma Processing (2020) 40:1163–1187

  9. Jing-Yu Sun, Quan-Zhi Zhang*, Jia-Rui Liu, Yuan-Hong Song and You-Nian Wang “Electrical asymmetry effect in inhomogeneously magnetized capacitively coupled plasmas”, Plasma Sources Sci. Technol. Accepted

  10. Jing-Yu Sun, Quan-Zhi Zhang*, Yong-Xin Liu and You-Nian Wang “Realistic treatment for secondary electron emission in hybrid DC/DF capacitively coupled discharge”, Plasma Sources Sci. Technol. 29 (2020) 024001

  11. Quan-Zhi Zhang*, and Annemie Bogaerts, “Plasma streamer propagation in structured catalysts”, Plasma Sources Sci. Technol. 27 (2018) 105013

  12. Quan-Zhi Zhang*, and Annemie Bogaerts, “Capacitive electrical asymmetry effect in an inductively coupled plasma reactor”, Plasma Sources Sci. Technol. 27 (2018) 105019

  13.   Quan-Zhi Zhang*, Wei-Zong Wang* and Annemie Bogaerts*,“Importance of surface charging during plasma streamer propagation in catalyst pores”, Plasma Sources Sci. Technol. 27 ( 2018) 065009

  14.  Quan-Zhi Zhang*, and Annemie Bogaerts*, “Propagation of a plasma streamer in catalyst pores”, Plasma Sources Sci. Technol, 27 (2018) 035009

  15. Quan-Zhi Zhang*, Stefan Tinck, Jean-Francois de Marneffe, Liping Zhang, and Annemie Bogaerts. “Mechanisms for plasma cryogenic etching of porous materials” Appl. Phys. Lett. 111, 173104 (2017)

  16. Quan-Zhi Zhang, You-Nian Wang and Annemie Bogaerts. “Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF4 discharge”, J. Appl. Phys., 115, 223302 (2014)

  17. Quan-Zhi Zhang, Yong-Xin Liu, Wei Jiang, Annemie Bogaerts and You-Nian Wang. “Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas”, Plasma Sources Sci. Technol. 22, 025014 (2013)

  18.      Quan-Zhi Zhang, Shu-Xia Zhao, Wei Jiang, and You-Nian Wang. “Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasma”, J. Phys. D: Appl. Phys. 45, 305203 (2012)

  19.  Quan-Zhi Zhang, Wei Jiang, Lu-Jing Hou, and You-Nian Wang. “Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge”, J. Appl. Phys. 109, 013308 (2011)

  20. Quan-Zhi Zhang, Wei Jiang, Shu-Xia Zhao, and You-Nian Wang. “Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources”, J. Vac. Sci. Technol. A 28, 287 (2010)

  21. Li Wang, De-Qi Wen, Quan-Zhi Zhang, Yuan-Hong Song, Yu-Ru Zhang, You-Nian Wang, “Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges”, Plasma Sources Sci. Technol. 2019 (accepted)

  22.  Annemie Bogaerts, Quan-Zhi Zhang, ZhangYu-Ru, Koen Van Laer, Weizong Wang, “Burning questions of plasma catalysis: Answers by modeling”, Catalysis Today. 2019 (accepted)

  23. Jing-Yu Sun, De-Qi Wen, Quan-Zhi Zhang, Yong-Xin Liu, and You-Nian Wang, “The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials”,Phys. Plasmas. 2019 (accepted)

  24.  WenZhu Jia, Quan-Zhi Zhang, XiFeng Wang, Yuan-Hong Song, Ying-Ying Zhang, You-Nian Wang, “Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma”, J. Phys. D: Appl. Phys. 52 (2019) 015206

  25. Jian-Guo Gu, Ya Zhang, Mingxiang Gao, Hong-Yu Wang, Quan-Zhi Zhang, Lin Yi, Wei Jiang,  “Enhancement of surface discharge in catalyst pores in dielectric barrier discharges”, J. Appl. Phys. 2019 (accepted)

  26.  Mingxiang Gao, Ya Zhang*, Hongyu Wang, Bin Guo, Quanzhi Zhang, Annemie Bogaerts,“Mode transition of filaments in packed-bed dielectric barrier discharges”, Catalysts. 8 (2018) 248

  27. Weizong Wang*, Antonin Berthelot, Quanzhi Zhang, and Annemie Bogaerts*, “Modelling of plasma-based dry reforming: How do uncertainties in the 2 input data affect the calculation results?”, J. Phys. D: Appl. Phys. 51 (2018) 204003

  28. De-Qi Wen, Quan-Zhi Zhang, Wei Jiang, Yuan-Hong Song, Annemie Bogaerts and You-Nian Wang. “Phase modulation in pulsed dual-frequency capacitively coupled plasmas” J. Appl. Phys. 115, 233303 (2014)

  29. Ya Zhang, Wei Jiang, Quan-Zhi Zhang, and Annemie Bogaerts. “Computational study of plasma sustainability in radio frequency micro-discharges” J. Appl. Phys., 115, 193301(2014)

  30. Jia Liu, Quan-Zhi Zhang, Yong-Xin Liu, Fei Gao, You-Nian Wang. “Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O2 discharges” J. Phys. D: Appl. Phys. 46, 235202 (2013)

  31. Yong-Xin Liu, Quan-Zhi Zhang, Jia Liu, Yuan-Hong Song, Annemie Bogaerts and You-Nian Wang. “Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges” Plasma Sources Sci. Technol. 22, 025012 (2013)

  32. Yong-Xin Liu, Quan-Zhi Zhang, Jia Liu, Yuan-Hong Song, Annemie Bogaerts and You-Nian Wang. “Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas” Appl. Phys. Lett. 101, 114101 (2012) 

  33. Yong-Xin Liu, Quan-Zhi Zhang, Wei Jiang, Xiang-Zhan Jiang, Wen-Qi Lu, and You-Nian Wang. “Experimental validation and simulation of collisionless bounce-resonance heating in capacitively coupled radio-frequency discharges” Plasma Sources Sci. Technol. 21, 035010 (2012)

  34. Yong-Xin Liu, Quan-Zhi Zhang, Wei Jiang, Xiang-Zhan Jiang, Wen-Qi Lu, You-Nian Wang and Lu-Jing Hou. “Collisionless bounce resonance heating in dual-frequency capacitively coupled plasmas” Phys. Rev. Lett. 107, 055002 (2011)

  35. Jing Bai, Jizhong Sun, Quanzhi Zhang, Dezhen Wang. “PIC simulation of RF hydrogen discharges in a transverse magnetic field”, Current Applied Physics 11, 140-144 (2011)

  36.  E Schungel, Q-Z Zhang, S Iwashita, J Schulze, L-J Hou, Y-N Wang and U Czarnetzki. “Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect”, J. Phys. D: Appl. Phys. 44 285205 (2011)

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