Title of Paper:Fast simulation strategy for capacitively-coupled plasmas based on fluid model

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Date of Publication:2024-10-24

Journal:Computer Physics Communications

Volume:307

ISSN No.:0010-4655

Key Words:Acceleration method; Capacitively coupled plasmas; Computational fluid dynamics; Electron fluid; Fast simulation; Fluid equations; Fluid modeling; Fluid simulations; Multi-time step; Performance; Up-wind scheme