Title of Paper:带有射频偏压源的感性耦合 Ar/O2/Cl2 等离子体放电的混合模拟研究

Hits:

Date of Publication:2024-08-01

Journal:ACTA PHYSICA SINICA

Volume:73

Issue:4

ISSN No.:1000-3290

Key Words:CHLORINE PLASMAS; DIAGNOSTICS; DYNAMICS; ELECTRON; ENERGY-DISTRIBUTION; ETCHING CHARACTERISTICS; MODEL; PROFILE EVOLUTION; SHEATH; SILICON