赵明亮   

Assistant Professor

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Language：English
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Paper Publications

Title of Paper:大面积矩形感性耦合等离子体源的三维流体力学模拟

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Date of Publication:2024-08-01

Journal:力学学报

Volume:55

Issue:12

Page Number:2891-2899

Key Words:三维流体力学模拟; 光伏工艺; 大面积矩形感性耦合等离子体源; 平板显示工艺

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