赵明亮   

Assistant Professor

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Language：English
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Paper Publications

Title of Paper:带有射频偏压源的感性耦合Ar/O2/Cl2等离子体放电的混合模拟研究

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Date of Publication:2024-08-01

Journal:物理学报

Key Words:偏压源; 感性耦合等离子体; 混合模型; 离子能量; 离子通量

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