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Project Participants:Shang GAO,Renke Kang,董志刚
Supported by:极大规模集成电路制造技术及成套工艺”科技重大专项（02专项）
Date of Project Approval:2019-03-25
Date of Project Initiation:2019-03-25
Scheduled completion time:2019-03-25
Date of Project Completion:2019-03-25