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Degree:Doctoral Degree
School/Department:机械工程学院

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

Design of Ultra-precision Machine for Integrated Grinding and Polishing of Silicon Wafers

Date of Publication:2018-01-01 Hits:

Indexed by:会议论文
Date of Publication:2018-01-01