Journal:机械研究与应用
Issue:6
Page Number:41-43
ISSN No.:1007-4414
Abstract:Sapphire is a kind of functional crystal material with excellent properties and widely used in the semiconductor and optoelectronic industry. Planetary double-side lapping is one of the most important methods in processing sapphire, the machi-ning precision and surface quality of work pieces are affected by the uniformity of abrasive trajectory significantly. In this pa-per, trajectory and velocity equations of abrasive are set up through the kinematical analysis of double-side lapping, and then a quantitative evaluation method of trajectory uniformity based on the Matlab discrete statistics is presented. With this method, variance value of abrasive's trajectory uniformity under given parameters is calculated and offers reference for the optimization of double-side lapping parameters.
Note:新增回溯数据
Date of Publication:2015-01-01