大连理工大学主页平台管理系统 zhuxianglong An empirical equation for prediction of silicon wafer deformation Home

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Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

An empirical equation for prediction of silicon wafer deformation

Release Time:2022-10-17 Hits:

Date of Publication:2022-10-05
Journal:Materials Research Express
Institution:机械工程学院
Volume:4
Issue:6
ISSN:2053-1591