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zhuxianglong

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Alma Mater:大连理工大学

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An empirical equation for prediction of silicon wafer deformation

Date of Publication:2022-10-05 Hits:

Journal:Materials Research Express
Affiliation of Author(s):机械工程学院
Volume:4
Issue:6
ISSN No.:2053-1591
Date of Publication:2022-10-05