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Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

DALIAN UNIVERSITY OF TECHNOLOGY      Login     

zhuxianglong

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Gender:Male

Alma Mater:大连理工大学

Paper Publications

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Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers
Release Time:2022-10-17  Hits:

Date of Publication:2022-10-03
Journal:PRECISION ENGINEERING JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEE
Volume:46
Page Number:339-348
ISSN:0141-6359

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