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Degree:Doctoral Degree
School/Department:机械工程学院

zhuxianglong

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Gender:Male

Alma Mater:大连理工大学

Paper Publications

Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers
Date of Publication:2022-10-03 Hits:

Journal:PRECISION ENGINEERING JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEE
Volume:46
Page Number:339-348
ISSN No.:0141-6359
Date of Publication:2022-10-03