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Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

晶硅片超精密磨削技术与设备

Release Time:2022-10-17 Hits:

Indexed by:Journal Article
Date of Publication:2022-07-01
Journal:中国机械工程
Institution:机械工程学院
Volume:21
Issue:18
Page Number:2156-2164
ISSN:1004-132X