Release Time:2024-07-18 Hits:
Indexed by:Journal Papers
Document Code:374381
Date of Publication:2023-02-02
Journal:制造技术与机床
Issue:02
Page Number:40-45
ISSN:1005-2402
Key Words:GaN; phoptoelectrochemical mechanical polishing; polishing device
CN:11-3398/TH