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Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

DALIAN UNIVERSITY OF TECHNOLOGY      Login     

zhuxianglong

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Gender:Male

Alma Mater:大连理工大学

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Theoretical and experimental analysis for the surface shape evolution of ultrathin workpiece considering the pad surface shape in double-sided polishing
Release Time:2024-07-18  Hits:

Indexed by:Journal Papers
Document Code:384648
Date of Publication:2024-01-10
Journal:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume:169
ISSN:1369-8001
Key Words:EDGE ROLL-OFF; MATERIAL REMOVAL; ROUGHNESS

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