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Degree:Doctoral Degree
School/Department:机械工程学院

DALIAN UNIVERSITY OF TECHNOLOGY      Login     

zhuxianglong

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Gender:Male

Alma Mater:大连理工大学

Paper Publications

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Theoretical and experimental analysis for the surface shape evolution of ultrathin workpiece considering the pad surface shape in double-sided polishing
Date of Publication:2024-03-29 Hits:

Journal:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume:169
ISSN No.:1369-8001
Key Words:EDGE ROLL-OFF; MATERIAL REMOVAL; ROUGHNESS
Date of Publication:2024-03-29

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