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Degree:Doctoral Degree
School/Department:机械工程学院

DALIAN UNIVERSITY OF TECHNOLOGY      Login     

zhuxianglong

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Gender:Male

Alma Mater:大连理工大学

Paper Publications

Current position: Home / Scientific Research / Paper Publications
Effect of aerostatic spindle dynamic characteristics on the medium frequency waviness error of silicon wafer surface
Date of Publication:2024-03-29 Hits:

Journal:INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
ISSN No.:0268-3768
Key Words:MACHINE-TOOL; PERFORMANCE; TOPOGRAPHY; VIBRATION
Date of Publication:2024-03-29

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