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Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

DALIAN UNIVERSITY OF TECHNOLOGY      Login     

zhuxianglong

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Gender:Male

Alma Mater:大连理工大学

Paper Publications

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Effect of aerostatic spindle dynamic characteristics on the medium frequency waviness error of silicon wafer surface
Release Time:2024-07-18  Hits:

Indexed by:Journal Papers
Document Code:384235
Date of Publication:2024-01-10
Journal:INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume:130
Issue:5-6
Page Number:2649-2659
ISSN:0268-3768
Key Words:MACHINE-TOOL; PERFORMANCE; TOPOGRAPHY; VIBRATION

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