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论文类型： 期刊论文

发表时间： 2010-09-19

发表刊物： Advanced Materials Research

收录刊物： EI、CPCI-S、Scopus

卷号： 126-128

页面范围： 707-712

ISSN号： 9780878492428

关键字： silicon wafers; grinder; quartz crystal; piezoelectric effect; grinding dynamometer

摘要： This paper presents a novel piezoelectric grinding dynamometer, aiming at the detecting demand of grinding force in the process of ultra-precision grinding. Grinder structure and interaction force distribution between grinding wheel and silicon wafers are considered. The working principle and structure of dynamometer are analyzed. The distribution of force sensors is designed. The static and dynamic calibration experiments and on-line grinding tests are carried out in the dynamometer. The working range of F(z) is +/- 1500N, both F(x) and F(y)), are +/- 600N. The linearities of F(x), F(y) and F(z) are more than 99.7%, the repeatabilities are more than 99%, and the crosstalks are all less than 3%. The natural frequency of F(z) is 1616 Hz, F(x) is 2383 Hz and F(y) is 2490 Hz. The dynamometer using piezoelectric effect has advantages of high sensitivity, good linearity and repeatability, simple structure, low cost, easy assembling and debugging. The results of experiments and tests reach the CIRP criteria and the working demands for the ultra-precision grinder.