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个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:大连理工大学
学位:博士
所在单位:机械工程学院
学科:机械制造及其自动化
办公地点:知方楼5130
联系方式:15998535043
电子邮箱:zhuxianglong@dlut.edu.cn
扫描关注
Model for surface topography prediction in the ultra-precision grinding of silicon wafers considering volumetric errors
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发表时间:2024-05-21
发表刊物:Measurement: Journal of the International Measurement Confederation
卷号:234
ISSN号:0263-2241
关键字:Error modeling; Errors; Functional points; Grinding (machining); Homogeneous transformation matrix; Linear transformations; Precision grinding machines; Silicon wafers; Surface topography; Surface topography prediction; Thinnings; Topography; Ultraprecision grinding; Volumetric errors; Wafer surface; Wafer surface quality