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一种在硅基底上制作多层微型电感线圈的UV-LIGA方法

Release Time:2019-03-09  Hits:

First Author: XU Zhixiang

Disigner of the Invention: 尹嘉鹏,寇锦,姜凤娟

Application Number: CN201210193138.9

Authorization Date: 2012-06-12

Authorization Number: CN102723259A

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