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硅基底多层线圈结构的微型涡流传感器

Release Time:2019-03-09  Hits:

First Author: XU Zhixiang

Disigner of the Invention: 孙浩,尹嘉鹏,姜凤娟

Application Number: CN201210193701.2

Authorization Date: 2012-06-12

Authorization Number: CN102721738A

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