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脉冲调制等离子体增强原子层刻蚀多尺度研究

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Leading Scientist:daizhongling

Project Participants:jiali,YongXin Liu

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:11375040

Date of Project Approval:2013-09-25

Scheduled completion time:2017-12-31

Date of Project Initiation:2014-01-01

Date of Project Completion:2017-12-31

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