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Scientific Research
戴忠玲
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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Scientific Research
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左春彦, 高飞, 戴忠玲, 王友年.高功率微波输出窗内侧击穿动力学的PIC/MCC模拟研究[J],物理学报,2018,22:340-350
左春彦, 高飞, 戴忠玲, 王友年.高功率微波输出窗内侧击穿动力学的PIC/MCC 模拟研究[J],物理学报,2018,67(22):267-278
戴忠玲, 董婉, 宋远红, 王友年.Effect of ion bombardment time on the profile of atomic layer etching[A],2018
董婉, 王喜凤, 宋远红, 戴忠玲, 王友年.Effect of plasma uniformity on etching profiles[A],2018
董婉, 戴忠玲, 宋远红, 王友年.ALE of SiO2 by alternating CF4 plasma with energetic Ar+ plasma beams[A],2018
Ma, Xiaoqin, Zhang, Saiqian, Dai, Zhongling, Wang, Younian, ZL (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Study on atomic layer etching of Si in inductively coupled Ar/Cl-2 plasmas driven by tailored bias waveforms[J],PLASMA SCIENCE & TECHNOLOGY,2017,19(8,SI)
Patents
一种用于等离子体刻蚀的元胞-水平集联合模拟方法
一种用于等离子体刻蚀的元胞-水平集联合模拟方法
Published Books
计算物理学习指导
大学物理实验(第二版)
大学物理实验
Research Projects
双频电容耦合放电等离子体流体动力学数值模拟, 国家自然科学基金项目, 2005/09/01, 结题
基于水平集方法的三维等离子体刻蚀剖面演化规律研究, 2008/07/15-2010/12/31, 结题
脉冲调制等离子体增强原子层刻蚀多尺度研究, 国家自然科学基金项目, 2013/09/25-2017/12/31, 结题
反应离子刻蚀微观不均匀性的跨尺度研究, 国家自然科学基金项目, 2009/09/25-2012/12/31, 结题
四面体网格划分技术合作项目, 企事业单位委托科技项目, 2018/11/15-2020/01/30, 结题