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戴忠玲
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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Paper Publications
[11]戴忠玲, 王友年.Accuracy control of SiO2 etching in inductively coupled CF4/Ar plasmas[A],2017
[12]Sui Jiaxing, Zhang Saiqian, Liu Zeng, Yan Jun, Dai Zhongling, Dai, ZL (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..A Multi-Scale Study on Silicon-Oxide Etching Processes in C4F8/Ar Plasmas[J],PLASMA SCIENCE & TECHNOLOGY,2016,18(6):666-673
[13]Wang Xifeng, Wang Younian, Dai Zhongling, Zhao Shuxia, Song Yuanhong, Song, YH (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge[J],PLASMA SCIENCE & TECHNOLOGY,2016,18(4):394-399
[14]戴忠玲, 王友年.Simulation of atomic layer etching of Si in inductively coupled argon/chlorine plasmas with tailo...[A],2016,51-51
[15]刘佳, 阎军, 戴忠玲, 宋亦旭.C4F8/AR混合气体刻蚀SiO2的多目标优化研究[A],2015,319-320
[16]Liu Zeng, Wang Younian, He Caiqiang, Dai Zhongling, Dai, ZL (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Effects of Tailed Pulse-Bias on Ion Energy Distributions and Charging Effects on Insulating Sub...[J],PLASMA SCIENCE & TECHNOLOGY,2015,17(7):560-566
[17]戴忠玲, 王友年.Atomic layer etching of SiO2 under Ar/C4F8 plasmas with pulsed bias[A],2015
[18]戴忠玲, 王友年.脉冲调制射频放电余辉期直流电压对离子能量分布的调控[A],2015
[19]You Zuowei, Dai Zhongling, Wang Younian, Dai, ZL (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China..Simulation of Capacitively Coupled Dual-Frequency N-2, O-2, N-2/O-2 Discharges: Effects of Exte...[J],PLASMA SCIENCE & TECHNOLOGY,2014,16(4):335-343
[20]Hao Meilan, Dai Zhongling, Wang Younian, Dai, ZL (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China..Effects of Low-Frequency Source on a Dual-Frequency Capacitive Sheath near a Concave Electrode[J],PLASMA SCIENCE & TECHNOLOGY,2014,16(4):320-323
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