Current position: Home >> Scientific Research >> Research Projects

水冷镜冷却单元研制

Hits:

Leading Scientist:Dong Zhigang

Supported by:企事业单位委托科技项目

Status:结题

Supported by:中国科学院大连化学物理研究所

Nature of Project:横向

Date of Project Approval:2012-06-15

Scheduled completion time:2017-06-14

Date of Project Initiation:2012-06-15

Date of Project Completion:2017-06-14

Pre One:300nm超薄晶圆减薄抛光一体机研发与产业化

Next One:飞机蒙皮镜像铣削加工机理及无划痕支撑关键技术