李佳艳

个人信息Personal Information

副教授

博士生导师

硕士生导师

性别:女

毕业院校:中科院长春应用化学研究所

学位:博士

所在单位:材料科学与工程学院

学科:材料学

办公地点:大连理工大学三束实验室4号楼

联系方式:0411-84709784

电子邮箱:lijiayan@dlut.edu.cn

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Distributions of substitutional and interstitial impurities in silicon ingot with different grain morphologies

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论文类型:期刊论文

发表时间:2017-08-15

发表刊物:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

收录刊物:SCIE、EI、Scopus

卷号:67

页面范围:1-7

ISSN号:1369-8001

关键字:Directional solidification; Grain morphology; Interstitial impurity; Substitutional impurity

摘要:A multicrystalline silicon ingot with columnar and irregular grains was obtained from metallurgical-grade silicon (MG-Si) by directional solidification. The segregation behaviors of substitutional and interstitial impurities in different grain morphologies have been studied. The concentration distribution of substitutional impurities (B and Al) in the silicon ingot was accord with the Scheil's equation, which depended on the grain morphology. However, the concentration distribution of interstitial impurities (Fe, Ti, Cu, and Ni) was only accord with the Scheil's equation under the columnar grains growth condition. The difference lattice sites of the impurities will result in the disparate segregation behavior of impurities for columnar and irregular grains growth, which leads to the diverse concentration distribution of substitutional and interstitial impurities in the silicon ingot. Furthermore, the transport mechanism of interstitial and substitutional impurities in front of the solid-liquid interface boundary has been revealed.