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论文类型： 期刊论文

发表时间： 2018-06-14

发表刊物： JOURNAL OF APPLIED PHYSICS

收录刊物： SCIE

卷号： 123

期号： 22

ISSN号： 0021-8979

摘要： The large-area capacitive discharges driven at very high frequencies have been attracting much attention due to their wide applications in material etching and thin film deposition. However, in the regime, the standing wave effect (SWE) becomes a major limitation for plasma material processing uniformity. In this work, a fiber Bragg grating sensor was utilized for the observation of the SWE in a large-area capacitive discharge reactor by measuring the radial distribution of the neutral gas temperature T-g. The influences of the RF power and the working pressure on the radial profiles of T-g were studied. At a higher frequency (100 MHz) and a lower pressure (5 Pa), T-g presents a center-peaked radial distribution, indicating a significant SWE. As the RF power increases, the central peak of T-g becomes more evident due to the enhanced SWE. By contrast, at 100MHz and a higher pressure (40 Pa), the radial distribution of T-g shows an evident peak at the electrode edge and T-g decays dramatically towards the discharge center because the electromagnetic waves are strongly damped as they are propagating from the edge to the center. At a lower frequency (27MHz), only edge-high profiles of T-g are observed for various pressures. For the sake of a comparison, a hairpin resonance probe was used to measure the radial distributions of the plasma density n(p) under the same condition. The radial profiles of T-g are found to generally resemble those of n(p) under various conditions. Based on the experimental results, the neutral gas heating mechanism was analyzed. Published by AIP Publishing.