XIoZYEeVlczEuwllC9H1Y43KboT1Y7NugJDSmr9a1MCONobp8ju1pMKuEn6q
Current position: Home >> Scientific Research >> Research Projects

等离子体刻蚀机结构与工艺优化仿真

Release Time:2024-10-26  Hits:

Leading Scientist: 张权治

Project Participants: 王友年

Project Source: 企事业单位委托科技项目

Status: 在研

Supported by: Zhongwei Semiconductor Equipment (Shanghai) Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2023-09-13

Scheduled Completion Time: 2024-08-24

Date of Project Initiation: 2023-09-13

Prev One:面向PECVD工艺的等离子体源优化设计和前驱反应物种与空间均匀性的仿真模拟

Next One:等离子体测试诊断及仿真