面向PECVD工艺的等离子体源优化设计和前驱反应物种与空间均匀性的仿真模拟
Release Time:2024-09-23 Hits:
Leading Scientist: 刘永新
Project Participants: 王友年,Kai Zhao,Fei Gao
Project Source: 企事业单位委托科技项目
Status: 结题
Supported by: Jiangsu Feiwotai Nanotechnology Co., Ltd.
Nature of Project: 横向
Date of Project Approval: 2022-06-30
Scheduled Completion Time: 2025-06-30
Date of Project Initiation: 2022-07-01
Date of Project Completion: 2024-09-14