双频容性耦合等离子体物理特性的研究
Release Time:2019-03-11 Hits:
Indexed by: Conference Paper
Date of Publication: 2007-08-20
Page Number: 69
Key Words: 等离子体物理;容性耦合;等离子体刻蚀;等离子体密度;能量分布;混合模型;轮廓线;Electron;sheath;不均匀性;
Abstract: ~~
Release Time:2019-03-11 Hits:
Indexed by: Conference Paper
Date of Publication: 2007-08-20
Page Number: 69
Key Words: 等离子体物理;容性耦合;等离子体刻蚀;等离子体密度;能量分布;混合模型;轮廓线;Electron;sheath;不均匀性;
Abstract: ~~