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射频感应耦合Ar/N2 等离子体物理特性的Langmuir 探针测量及理论研究

Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 2008-01-01

Journal: 物理学报

Included Journals: ISTIC、PKU

Volume: 57

Issue: 8

Page Number: 5213-5215

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