location: Current position: Home >> Scientific Research >> Paper Publications

Numerical simulations of electrical asymmetry effect on electronegative

Hits:

Indexed by:期刊论文

Date of Publication:2011-01-01

Journal:JOURNAL OF APPLIED PHYSICS

Volume:109

Issue:1

Page Number:13308-13308

Pre One:Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon

Next One:EFFECT OF APPLIED PULSE BIAS ON SHEATH CHARACTERISTICS IN PLASMA SOURCE ION IMPLANTATION WITH DIELECTRIC SUBSTRATES