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Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon

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Indexed by:期刊论文

Date of Publication:2011-01-01

Journal:PlasmasPlasma Science and Technology

Volume:13

Issue:2

Page Number:181-187

Pre One:Plasma Uniformity in a Dual Frequency Capacitively Coupled Plasma Reactor Measured by Optical Emission Spectroscopy

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