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双频容性耦合等离子体密度的径向均匀性研究

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Indexed by:期刊论文

Date of Publication:2012-01-01

Journal:物理学报

Included Journals:PKU、ISTIC

Volume:61

Issue:1

Page Number:15204-15204

Pre One:Time evolution and energy deposition for ion clusters injected into magnetized

Next One:Surface nanostructure of a directionally DZ4 induced by high intensity pulsed ion beam irradiation
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