NAME

王友年

Paper Publications

双频容性耦合等离子体密度的径向均匀性研究
  • Hits:
  • Indexed by:

    期刊论文

  • First Author:

    陆文琪

  • Co-author:

    王友年

  • Date of Publication:

    2012-01-01

  • Journal:

    物理学报

  • Included Journals:

    PKU、ISTIC

  • Document Type:

    J

  • Volume:

    61

  • Issue:

    1

  • Page Number:

    15204-15204

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