双频容性耦合等离子体密度的径向均匀性研究
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2012-01-01
Journal: 物理学报
Included Journals: ISTIC、PKU
Volume: 61
Issue: 1
Page Number: 15204-15204
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2012-01-01
Journal: 物理学报
Included Journals: ISTIC、PKU
Volume: 61
Issue: 1
Page Number: 15204-15204