Release Time:2019-03-13 Hits:
Indexed by: Journal Article
Date of Publication: 2012-01-01
Journal: Applied Surface Science
Volume: 258
Issue: 20
Page Number: 8061-8064
Prev One:双频容性耦合等离子体密度的径向均匀性研究
Next One:A One-Dimensional Hybrid Simulation of DC/RF Combined Driven Capacitive Plasma