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Indexed by:期刊论文

Date of Publication:2012-01-01

Journal:PLASMA SCIENCE & TECHNOLOGY

Included Journals:SCIE、EI、Scopus

Volume:14

Issue:1

Page Number:32-36

ISSN No.:1009-0630

Key Words:capacitively coupled plasmas; DC/RF combined driven; hybrid model; IEDs; IADs

Abstract:We developed a one-dimensional hybrid model to simulate the DC/RF combined driven capacitively coupled plasma for argon discharges. The numerical results are used to analyze the influence of the DC source on the plasma density distribution, ion energy distributions (IEDs) and ion angle distributions (IADs) on both the RF and DC electrodes. The increase in DC voltage drives more high-energy ions to the electrode applied to the DC source, which makes the IEDs at the DC electrode shift towards higher energy, and the peaks in the IADs shift towards small angle regions. At the same time, it also decreases the ion energy at the RF electrode and enlarges the incident angles of the ions, which strike the RF electrode.