location： Current position: Home >> Scientific Research >> Paper Publications

Modulations of the plasma uniformity by low frequency sources in a large-area dual

Hits:

Indexed by:期刊论文

Date of Publication:2015-01-01

Journal:Phys. Plasmas.

Volume:22

Issue:5

Page Number:53508-53508

Pre One:Fluid simulation of inductively coupled Ar/O2 plasmas:Comparisons with experiment

Next One:Modeling and experimental investigation of the plasma uniformity in CF4/O2
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep