Current position: Home >> Scientific Research >> Paper Publications

Modulations of the plasma uniformity by low frequency sources in a large-area dual

Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 2015-01-01

Journal: Phys. Plasmas.

Volume: 22

Issue: 5

Page Number: 53508-53508

Prev One:Fluid simulation of inductively coupled Ar/O2 plasmas:Comparisons with experiment

Next One:Modeling and experimental investigation of the plasma uniformity in CF4/O2