location： Current position: Home >> Scientific Research >> Paper Publications

Modeling and experimental investigation of the plasma uniformity in CF4/O2

Hits:

Indexed by:期刊论文

Date of Publication:2015-01-01

Journal:J. Vac. Sci. Technol. A

Volume:33

Issue:2

Pre One:Modulations of the plasma uniformity by low frequency sources in a large-area dual

Next One:Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep