Current position: Home >> Scientific Research >> Paper Publications

Modeling and experimental investigation of the plasma uniformity in CF4/O2

Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 2015-01-01

Journal: J. Vac. Sci. Technol. A

Volume: 33

Issue: 2

Prev One:Modulations of the plasma uniformity by low frequency sources in a large-area dual

Next One:Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Browse on mobile