NAME

王友年

Paper Publications

Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency capacitively couple plasma with a hybrid model
  • Hits:
  • Indexed by:

    期刊论文

  • First Author:

    徐翔

  • Co-author:

    王友年

  • Date of Publication:

    2007-01-01

  • Journal:

    Phys. Plasmas

  • Document Type:

    J

  • Volume:

    14

  • Issue:

    11

  • Page Number:

    113501-113501

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